Honeycomb structure is extraordinarily effective to trap light,and the efficiency of solar cell with this texture is as high as 24.4%.In this paper,plasma immersion ion implantation and acid etching are applied to texture multi-crystalline silicon.Surface reflectivity and surface morphology are investigated by UV–Vis–NIR spectrophotometer and field emission scanning electron microscopy,respectively.We found that random nano-honeycomb structures have been formed on silicon surface.The weighted average reflectance is 7.68%from 300 to 1,100 nm wavelength region.We obtained honeycomb-textured solar cells following standard fabrication protocol.These solar cells show obvious better performance in short circuit current density([5.4%)and efficiency(*0.8%absolute)compared with acid-textured cell,while other performance parameters,such as open circuit voltage and fill factor,are not deteriorated.
Jie LiuBangwu LiuSihua ZhongJinhu LiuYang XiaChaobo Li
