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国家自然科学基金(51275115)

作品数:3 被引量:4H指数:1
相关作者:雷向阳张帅王翔峰王健许乔更多>>
相关机构:中国工程物理研究院更多>>
发文基金:国家自然科学基金更多>>
相关领域:机械工程金属学及工艺理学更多>>

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KDP晶体元件晶轴角度的精密校正
2021年
大型激光装置要求KDP(Potassium Dihydrogen Phosphate,KH2PO4)晶体在加工阶段进行高精度定轴,以降低后续装调难度,提升批量装调效率。为此在加工阶段,提出一种在位检测反馈和多次调节逼近的晶轴角度校正策略,从原理上避免了校正精度严重依赖调节工装精度、重复装夹误差大、机床直线度引入误差等问题;并且为提升晶轴角度的校正效率,研制了电动控制的高精度吸盘角度调节工装,解决了校正角度大、精度要求高的难题。验证结果表明:采用研制的高精度吸盘角度调节工装,经过3轮次的迭代,可以将晶轴角度误差从2~4 mrad快速收敛至20μrad以内,满足大型激光装置的要求。所提策略的校正精度仅取决于测头移动长度和测试精度,且元件口径越大、测量精度越高,校正精度就越高,因此所提策略特别适用于大口径KDP晶体元件的晶轴角度的精密校正。
张帅金波佳王翔峰雷向阳王健许乔
关键词:光学器件金刚石切削相位匹配
Dynamic Accuracy Design Method of Ultra-precision Machine Tool被引量:3
2018年
Ultra-precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design(DAD) is indispensable and the related research is rarely available. In light of above reasons, a DAD method of ultra-precision machine tool is proposed in this paper, which is based on the frequency domain error allocation.The basic procedure and enabling knowledge of the DAD method is introduced. The application case of DAD method in the ultra-precision flycutting machine tool for KDP crystal machining is described to show the procedure detailedly. In this case, the KDP workpiece surface has the requirements in four different spatial frequency bands, and the emphasis for this study is put on the middle-frequency band with the PSD specifications. The results of the application case basically show the feasibility of the proposed DAD method. The DAD method of ultra-precision machine tool can effectively minimize the technical risk and improve the machining reliability of the designed machine tool. This paper will play an important role in the design and manufacture of new ultra-precision machine tool.
Guo-Da ChenYa-Zhou SunFei-Hu ZhangLi-Hua LuWan-Qun ChenNan Yu
Investigation of Surface Micro Waviness in Single Point Diamond Fly Cutting被引量:1
2014年
Single point diamond fly cutting is widely used in the manufacture of large-aperture ultra-precision optical elements. However,some micro waviness( amplitude about 30 nm,wavelength about 15 mm) along the cutting direction which will decrease the quality of the optical elements can always be found in the processed surface,and the axial vibration of the spindle caused by the cut-in process is speculated as the immediate cause of this waviness. In this paper,the analytical method of dynamic mesh is applied for simulating the dynamic behavior of the vertical spindle. The consequence is then exerted to the fly cutter and the processed surface profile is simulated. The wavelength of the simulation result coincides well with the experimental result which proves the importance of the cut-in process during the single point diamond fly cutting.
Sheng-Fei WangPeng-Qiang FuFei-Hu ZhangChen-Hui AnYong Zhang
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