离轴非球面反射镜是高分辨率、大视场空间相机的核心元件,其镜面的形状精度和表面质量要求极高,加工难度很大,一直是光学系统先进制造技术的瓶颈。针对国家对空间大型SiC光学元件制造技术的重大需求,开展以大口径、高陡度、大离轴量和大偏离量为特点的离轴非球面反射镜的精密铣磨加工技术研究。开发非球面反射镜计算机辅助数控编程技术,提出五轴联动斜轴定角度加工方式,建立旋转中心在镜面外的螺旋加工轨迹,避免镜面几何中心处的加工残留。并基于五轴加工中心(型号DMG Ultrasonic 100-5)搭建超声振动辅助铣磨加工平台,以900 mm×660 mm口径离轴非球面SiC反射镜镜坯为加工样件进行工艺试验,加工面形精度峰谷值(Peak to valley,PV)达到18.8μm,方均根值(Root mean square,RMS)达到3.5μm。研究为按照非球面方程高精度铣磨超大尺度精度比离轴非球面反射镜提供了有效的解决方案。
Based on the distribution characteristic of magnetic field along the polish wheel,the four-axis linkage technique is advanced to replace a standard five-axis one to figure low-gradient optical surfaces with a raster tool-path in magnetorheological finishing(MRF).After introducing the fundaments of such simplification,the figuring reachability of a four-axis system for the low-gradient optics was theoretically analyzed.Further validation including magnetic field intensity and influence function characteristic was performed to establish its application.To demonstrate the correctness,feasibility and applicability of such technique,a K4 spherical part was figured by two iterations of MRF with surface form error improved to 0.219λPV and 0.027λRMS.Meanwhile,the surface roughness was also improved a lot in MRF process.These theoretical analyses and experimental results both indicate that high form accuracy and excellent surface quality can be obtained by using the four-axis linkage technique in the process of figuring low-gradient optical elements,and the four-axis linkage system undoubtedly is much more easy to control and much more economical.
