The CoCr/Pt bilayers and (CoCr/Pt)_(20) multilayers with Pt underlayer wereprepared by DC magnetron sputtering. The effects of prepared condition on perpendicular magneticanisotropy were investigated. The results show that the thickness of Pt under-layer has a greateffect on the microstructure and perpendicular magnetic anisotropy of CoCr/Pt bilayers and(CoCr/Pt)_(20) multilayers. When the thickness of Pt underlayer increases, Pt(lll) and CoCr(002)peaks of both CoCr/Pt bilayers and (CoCr/Pt)_(20) multilayers increase and the bilayer periodicityof the multilayers is improved. The effective magnetic anisotropy of (CoCr/Pt)_(20) multilayers withPt underlayer was much larger than that of CoCr/Pt bilayers. The (CoCr/Pt)_(20) multilayers has astronger perpendicular magnetic anisotropy than that of CoCr/Pt bilayers. This is ascribed to theinterface magnetic anisotropy of the multilayers.
