采用双层微悬臂梁理论模型,对基于反铁电薄膜微悬臂梁驱动构件的力学行为进行分析研究.以反铁电薄膜材料体积应变=ε0.8%为设定量,实现硅基反铁电薄膜微悬臂梁结构的应变-应力载荷转化,运用AN SY S11.0对基于反铁电薄膜应变效应的硅基微悬臂梁结构进行了静态分析、模态分析和谐响应分析,通过对此微驱动结构的优化设计、仿真,得出了不同几何参数硅基微悬臂梁构件的挠度和谐振频率.从而无需进行大量的工艺流片,为大量程的微悬臂梁驱动构件的设计加工提供指导意义.
Pb0.97La0.02Zr0.95Ti0.05O3(PLZT)antiferroelectric thick films derived from different precursor solution concentrations are prepared on platinized silicon substrates by sol-gel processing.The films present polycrystalline perovskite structure with a(100)preferred orientation by X-ray diffraction(XRD)analysis.The antiferroelectricity of the films is confirmed by the double hysteresis behaviors of polarization and double-bufferfly response of dielectric constant under the applied electrical field.Antiferroelectric properties and dielectric constant are improved while the polarization characteristic values are reduced with the increase of precursor solution concentration.The films at higher precursor solution concentration exhibit excellent dielectric properties.
