A comb-drive actuator for lateral movement of over 100μm under low driving voltage is designed. Side stability is analyzed to improve the performance of the actuator. According to the analysis,a comb-drive actuator with small comb gap,high-stiffness-ratio prebent suspension beams, non-initial overlap, and linear-engaged-length comb teeth is proposed and the parameters of the actuator are derived. Experiments indicate that the actuator resonates at 573Hz with a Q factor of 35.88 and reaches a maximum displacement of over 100μm at a driving voltage of 7IV,which fulfills the design requirements and matches the analytical value to within 2.1%.
