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国家自然科学基金(10675092)

作品数:4 被引量:5H指数:2
相关作者:黄秋实陈玲燕王占山朱京涛李浩川更多>>
相关机构:同济大学更多>>
发文基金:国家自然科学基金上海市教育发展基金国家高技术研究发展计划更多>>
相关领域:理学机械工程更多>>

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4 条 记 录,以下是 1-5
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Mo/Si多层膜表面保护层设计
为提高Mo/Si多层膜的稳定性与使用寿命,研究Mo/Si多层膜表面保护层设计。通过分析多层膜驻波电场的分布,对表面保护层及多层膜最上层材料的厚度进行优化设计,使优化后的反射率最高。计算表明,一定厚度的表面保护层总对应一个...
徐达朱京涛张众王风丽王晓强王洪昌蒋励佘仕凤王占山秦树基陈玲燕
关键词:薄膜光学多层膜反射率
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基于多层膜技术的硬X射线Laue透镜衍射效率的理论研究被引量:2
2009年
采用耦合波理论分析了X射线在多层膜Laue透镜中的传播,选择Cu的Kα线作X射线光源,计算了多层膜Laue透镜的衍射效率.材料为WSi2/Si,最外层宽度为10 nm,深度为8 500 nm的多层膜Laue透镜,倾斜情况下外层区域局部光栅的衍射效率可达59%,理论上证明了多层膜Laue透镜是实现X射线聚焦的有效手段.
黄秋实李浩川朱京涛桑田王占山陈玲燕
关键词:X射线光学多层膜耦合波理论
Intrinsic stress analysis of sputtered carbon film被引量:2
2008年
Intrinsic stresses of carbon films deposited by direct current (DC) magnetron sputtering were investigated. The bombardments of energetic particles during the growth of films were considered to be the main reason for compressive intrinsic stresses. The values of intrinsic stresses were determined by measuring the radius of curvature of substrates before and after film deposition. By varying argon pressure and target-substrate distance, energies of neutral carbon atoms impinging on the growing films were optimized to control the intrinsic stresses level. The stress evolution in carbon films as a function of film thickness was investigated and a void-related stress relief mechanism was proposed to interpret this evolution.
刘丽琴王占山朱京涛张众谭默言黄秋实陈锐徐敬陈玲燕
关键词:ARGONCARBONSUBSTRATES
Influence of interface roughness on reflectivity of tungsten/boron-carbide multilayers with variable bi-layer number by X-ray reflection and diffuse scattering
2009年
Infuence of interface roughness on the reflectivity of Tungsten/boron-carbide (W/B4C) multilayers varying with bi-layer number, N, is investigated. For W/B4C multilayers with the same design period thickness of 2.5 nm, a real-structure model is used to calculate the variation of reflectivities with N = 50, 100, 150, and 200, respectively. Then, these multilayers are fabricated by a direct current (DC) magnetron sputtering system. Their reflectivity and scattering intensity are measured by an X-ray diffractometer (XRD) working at Cu Kα line. The X-ray reflectivity measurement indicates that the reflectivity is a function of its bi-layer number. The X-ray scattering measured results show that the interface roughness of W/B4C multilayers increases slightly from layer to layer during multilayer growing. The variation of the reflectivity and interface roughness with bi-layer number is accurately explained by the presented realstructure model.
代敏张众朱京涛王晓强徐敬付秀华白亮黄秋实王占山陈玲燕
关键词:REFLECTIONSCATTERING
用傅里叶变换方法实现的纳米多层膜性能表征被引量:1
2009年
利用傅里叶变换(FFT)分析了纳米多层膜的X射线掠入射反射率测试曲线,模拟了各种制备和测试条件对多层膜结构参数测试结果的影响,检验了傅里叶变换方法的适用性和精确度。分析结果表明,相对于传统的反射曲线拟合方法,傅里叶变换方法具有直观和快速的优点,在不引入主观的膜层结构模型的情况下可以较为准确地定出复杂的多层膜结构参数,为多层膜结构表征提供了一种分析方法。
蒋晖徐敬朱京涛黄秋实白亮王晓强王占山陈玲燕
关键词:纳米多层膜傅里叶变换自相关函数
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