Nano-sized Copper(Cu)particles and rods were prepared by annealing Cu-Zr,and Cu-Al-Zr composite films on polyimide substrates.XRD,FESEM and EDS were used to characterize their microstructure and composition.Results show that faceted Cu particles are regular and pure Cu element.Furthermore,it was interesting to find that Cu nanorods might appear on the surface of annealed Cu-Al-Zr composite thin films.Based on the experimental results and analysis,it were speculated that these Cu particles are single crystals.The particle average sizes are closely related to the content of Zr as well as annealing temperature and atmosphere.This work may provide a new approach to prepare metal particles and nanorods on the surface of Cu composite films on polyimide substrates.
Sun HaoliangMing, WeiZhan JingmeiSong ZhongxiaoFei, MaXu Kewei
Tungsten (W) thin films were prepared by magnetron sputtering onto Si (100) substrates. Their microstructures were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM) and transmission electron microscopy (TEM). The hardness and modulus were evaluated by nanoindentation. It is found that a 30 nm Cr sticking layer induces structure changes of deposited W film from β-W to α-W structure. In addition, remarkable hardness enhancement both for the deposited and annealed W films, were compared with that of bulk coarse-grained W, although their nanoindentation modulus is very close to that of corresponding bulk W. The intrinsic reasons that lead to structure changes and super hardness are discussed.
H.L. Sun, Z.X. Song, D.G. Guo, F. Ma and K.W. Xu State Key Laboratory for Mechanical Behavior of Materials, School of Materials Science and Engineering, Xi an Jiaotong University, Xi’an 710049, China
