利用矩形薄板面内2个不同模态作为工作模态的直线型超声电机,其频率一致性和压电单元的布置方式以及激励方式对电机的性能和效率有重要的影响。该文根据电机定子的位移振型和应变振型详细分析了压电陶瓷的布置方式和激励方式,并利用参数化有限元方法(finite element method,FEM)对定子结构进行优化设计。设计制作的样机,两相工作模态频率差为270Hz,在电压峰峰值为350V、驱动频率为44.16kHz、预压力为50N的情况下,电机最大空载速度为100mm/s,最大输出力为3N。
In recent years, the research and development of piezoelectric pumps have become an increasingly popular topic. Minimization, structure simplification and stronger output become the focus of piezoelectric pumps’ research due to its possible application in MEMS technology. The valveless fishtailing piezoelectric pump, neither a volumetric nor a rotating pump, was invented according to the bionics of fish swimming. With assumption that the head of the fish is fixed while its tail is swinging, fluid would flow toward the end of the tail, achieving the function of a valveless pump. This type of pumps creates a new branch for the piezoelectric pump research, which is proposed for the first time in this paper. The relationship between the flow rates and vibrating frequencies was derived from the interaction between the vibrator and fluid. Numerical simulations with FEM software were conducted to study the first and second vibration modes of the piezoelectric vibrator. The results showed that the maximum amplitude of the vibrator was 0.9 mm at the frequency of 76 Hz for the first vibration mode, while the maximum amplitude of the vibrator was 0.22 mm at the frequency of 781 Hz for the second vibration mode. Experiments were conducted with the Doppler laser vibration measurement system, and the results were compared to those of the FEM simulation. It was shown that in the first vibration mode the piezoelectric vibrator reached its maximum amplitude of about 0.9 mm at the driving frequency of 49 Hz, which gives the flow rate of 2.0 mL/min, in the second vibration mode, the maximum amplitude was about 0.25 mm at the frequency of 460 Hz with the flow rate being 6.4 mL/min.
HUANG Yi1, ZHANG JianHui1, HU XiaoQi1, XIA QiXiao2, HUANG WeiQing1 & ZHAO ChunSheng1 1 Department of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
