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国家自然科学基金(s10874065)

作品数:3 被引量:3H指数:1
相关作者:刘治国朱健民闵乃本朱信华更多>>
相关机构:南京大学更多>>
发文基金:国家自然科学基金国家重点基础研究发展计划江苏省自然科学基金更多>>
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高k栅介质原子分辨率的电镜表征:研究进展和展望(英文)被引量:1
2009年
随着特征尺寸不断缩小,CMOS器件已步入纳米尺度范围,因此纳米尺度器件的结构表征变得尤为关键。完备的半导体器件结构分析,要求确定原子位置、局部化学元素组成及局域电子结构。高分辨(分析型)透射电镜及其显微分析技术,能够提供衍衬像(振幅衬度像)、高分辨像(相位衬度像)、选区电子衍射和会聚束电子衍射、X射线能谱(EDS)及电子能量损失谱(EELS)等分析手段,已作为半导体器件结构表征的基本工具。配有高角度环形暗场探测器的扫描透射电镜(STEM),因其像的强度近似正比于原子序数(Z)的平方,它可在原子尺度直接确定材料的结构和化学组成。利用Z-衬度像配合高分辨电子能量损失谱技术,可确定新型CMOS堆垛层中的界面结构、界面及界面附近的元素分布及化学环境。近年来新开发的球差校正器使得HRTEM/STEM的分辨率得到革命性提高(空间分辨率优于0.08 nm,能量分辨率优于0.2 eV),在亚埃尺度上实现单个纳米器件的结构表征。装备球差校正器的新一代HRTEM和STEM,使得高k栅介质材料的研究进入一个新时代。本文首先介绍了原子分辨率电镜(HRTEM和STEM)的基本原理和关键特征,对相关高分辨谱分析技术(如EDS和EELS)加以比较;然后综述了HRTEM/STEM在高k栅介质材料(如铪基氧化物、稀土氧化物和外延钙钛矿结构氧化物)结构表征方面的最新进展;最后对亚埃分辨率高k栅介质材料的结构表征进行了展望。
朱信华朱健民刘治国闵乃本
关键词:HRTEMSTEM
Structural,spectroscopic,and dielectric characterizations of Mn-doped 0.67BiFeO_(3)-0.33BaTiO_(3)multiferroic ceramics被引量:2
2013年
0.67BiFeO_(3)-0.33BaTiO_(3)multiferroic ceramics doped with x mol%MnO_(2)(x=2-10)were synthesized by solid-state reaction.The formation of a perovskite phase with rhombohedral symmetry was confirmed by X-ray diffraction(XRD).The average grain sizes were reduced from 0.80mm to 0.50mm as increasing the Mn-doped levels.Single crystalline nature of the grains was revealed by high-resolution transmission electron microscopy(HRTEM)images and electron diffraction patterns.Polar nano-sized ferroelectric domains with an average size of 9 nm randomly distributed in the ceramic samples were revealed by TEM images.Ferroelectric domain lamellae(71°ferroelectric domains)with an average width of 5 nm were also observed.Vibrational modes were examined by Raman spectra,where only four Raman peaks at 272 cm^(-1)(E-4 mode),496 cm^(-1)(A_(1)-4 mode),639 cm^(-1),and 1338 cm^(-1)were observed.The blue shifts in the E-4 and A_(1)-4 Raman mode frequencies were interpreted by a spring oscillator model.The dieletric constants of the present ceramics as a function of the Mn-doped levels exhibited a V-typed curve.They were in the range of 350-700 measured at 10^(3)Hz,and the corresponding dielectric losses were in range of 0.43-0.96,approaching to 0.09 at 10^(6)Hz.
Qiming HANGWenke ZHOUXinhua ZHUJianmin ZHUZhiguo LIUTalaat AL-KASSAB
SIZE EFFECTS IN PEROVSKITE FERROELECTRIC NANOSTRUCTURES:CURRENT PROGRESS AND FUTURE PERSPECTIVES
2011年
Perovskite ferroelectric nanostructures offer a wide range of functional properties(e.g.,dielectric switchability,piezoelectricity,pyroelectricity,high permittivities and strong electro-optic effects),which have received much attention in theelds of microelectronic devices miniaturization over the last few years.Pronounced size effects of the functional properties have been demonstrated in the perovskite ferroelectric nanostructures.Besides its intrinsic scientic value,fundamental understanding of the size effects in perovskite ferroelectric nanostructures has become critical item for developing a new generation of revolutionary nanodevices.In this article,a comprehensive review of the state-of-the-art research progress on the size effects in perovskite ferroelectric nanostructures which have been achieved from both experiment and theory is provided.It begins with a historical perspective of the size effects in perovskite ferroelectrics,and then highlight the recent progress on the theoretical studies of the size effects in perovskite ferroelectric nanostructures which have been achieved by using different numerical approaches(e.g.,phenomenological approaches,rst-principle computations and the Ising model in a transverseeld).The current progress of the experimental testing of the size effects in perovskite ferroelectric nanostructures(e.g.,nanoparticles,nanowires,nanotubes and nanolms)is summarized.Finally,the perspectives toward the future challenges of the size effects in perovskite ferroelectric nanostructures is reviewed.
XINHUA ZHUZHIGUO LIU
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