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国家自然科学基金(91323303)

作品数:14 被引量:32H指数:3
相关作者:陈林森詹东平顾新宇范广飞魏国军更多>>
相关机构:苏州大学厦门大学西安交通大学更多>>
发文基金:国家自然科学基金国家教育部博士点基金霍英东教育基金更多>>
相关领域:理学一般工业技术电子电信自动化与计算机技术更多>>

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14 条 记 录,以下是 1-10
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基于衍射追迹的集成成像重构算法被引量:6
2016年
衍射受限集成成像光线追迹算法所重构的深度平面是物体深度的重聚焦图像,重构图像像质模糊,不利于物体的三维重构。针对这些问题,提出了一种基于衍射追迹的深度平面重构算法,由菲涅耳衍射公式计算物空间点源传播至成像系统各平面的光场分布,最终求得每个采样点在传感器上的光强脉冲响应,通过反解与光强脉冲响应相关的线性方程组,实现物体深度平面的图像重构。仿真结果表明,采用该方法实现的重构图像是物体的深度平面切片,而且图像像质接近于原始图像,有利于物体的三维重建。
范广飞陈林森魏国军顾新宇
关键词:成像系统菲涅耳衍射
表面形貌对螺旋线形跨尺度电化学葡萄糖传感器性能的影响被引量:2
2014年
将键合金丝以螺旋方式紧密绕制在光纤纤芯上,用水浴法在其表面合成氧化锌纳米线,再将葡萄糖氧化酶物理吸附在纳米线上,得到了螺旋线形跨尺度葡萄糖酶电极。提取了该跨尺度结构及相应酶电极的表面形貌,表征了该批酶电极的电化学性能。结果表明,氧化锌纳米线的合成参数对跨尺度结构的表面形貌、葡萄糖氧化酶的固定效果、跨尺度电化学葡萄糖传感器的性能有显著影响;当生长液Zn2+浓度为25 mmol/L时,跨尺度结构表面形貌的粗糙度为0.10μm、相关长度0.29μm,此时葡萄糖氧化酶的固定效果最好,对应的葡萄糖传感器灵敏度为2.15μA/(mmol/L·cm2)、线性范围0~4.5 mmol/L、检出限9.2μmol/L、Michaelis-Menten常数3.68 mmol/L。研究结果不但有助于螺旋线形跨尺度酶电极的批量制备,还可显著提高其测量精度。
景蔚萱周帆成妍妍齐含陈路加蒋庄德王兵
关键词:表面形貌葡萄糖生物传感器循环伏安法计时电流法
Electropolishing of titanium alloy under hydrodynamic mode被引量:3
2016年
Titanium(Ti) alloys are widely used in aerospace industry due to the low density and high corrosion resistance. However, machining and polishing remain great challenges because of the hardness and chemical stability. With a home-made electrochemical machining workstation, cyclic voltammetry is performed at a wide potential range of [0 V, 20 V] to record the details of passivation and depassivation processes under a hydrodynamic mode. The results show that the thickness of viscous layer formed on the alloy surface plays a crucial effect on the electropolishing quality. The technical parameters, including the mechanical motion rate, polishing time and electrode gap, are optimized to achieve a surface roughness less than 1.9 nm, which shows a prospective application in the electrochemical machining of Ti and it alloys.
Pei HuangJunhui LaiLianhuan HanFang-Zu YangLi-Min JiangJian-Jia SuZhao-Wu TianZhong-Qun TianDongping Zhan
关键词:钛合金
基于闪耀光栅图形化实现高分辨率干涉光刻被引量:3
2015年
为提高图形化干涉光刻质量,提出了基于闪耀光栅的图形化干涉光刻(PIIL)系统,并对该系统所采用的光学原理和实现方法进行了研究。首先,分析了图形化干涉光刻系统的光场特性,阐述了其分辨率提升的原理。讨论了光学系统带宽和图案分布对光刻图形质量的影响,给出了图形质量控制的工艺方法。其次,提出了一种新型的图形化干涉光刻方法,该方法采用闪耀光栅作为衍射分光器件,实现了位相和振幅的一体化调制。采用数值计算方法模拟了闪耀光栅的衍射特性和像面光场分布,讨论了闪耀光栅的优化设计方法,获得了高达92.3%的±1级衍射效率。最后,基于数字微镜器件(DMD)和微缩成像光路设计开发了图形化干涉光刻系统,实验获得了像素化的点阵图形和质量明显改善的光刻图像,验证了该方法对任意图形的适用性。
胡进董晓轩浦东林申溯陈林森
关键词:傅里叶光学衍射效率激光直写数字微镜器件
Fabrication of Nanoscale Step Height Structure Using Atomic Layer Deposition Combined with Wet Etching被引量:3
2016年
The current techniques used for the fabrication of nanosteps are normally done by layer growth and then ion beam thinning. There are also extra films grown on the step surfaces in order to reduce the roughness. So the whole process is time consuming. In this paper, a nanoscale step height structure is fabricated by atomic layer deposition(ALD) and wet etching techniques. According to the traceable of the step height value, the fabrication process is controllable. Because ALD technology can grow a variety of materials, aluminum oxide(Al_2O_3) is used to fabricate the nanostep. There are three steps of Al_2O_3 in this structure including 8 nm, 18 nm and 44 nm. The thickness of Al_2O_3 film and the height of the step are measured by anellipsometer. The experimental results show that the thickness of Al_2O_3 film is consistent with the height of the step. The height of the step is measured by AFM. The measurement results show that the height is related to the number of cycles of ALD and the wet etching time. The bottom and the sidewall surface roughness are related to the wet etching time. The step height is calibrated by Physikalisch-Technische Bundesanstalt(PTB) and the results were 7.5±1.5 nm, 15.5±2.0 nm and 41.8±2.1 nm, respectively. This research provides a method for the fabrication of step height at nanoscale and the nanostep fabricated is potential used for standard references.
WANG ChenyingYANG ShumingJING WeixuanREN WeiLIN QijingZHANG YijunJIANG Zhuangde
关键词:原子层沉积湿法刻蚀AL2O3薄膜氧化铝薄膜
The coupling effect of slow-rate mechanical motion on the confined etching process in electrochemical mechanical micromachining被引量:1
2018年
By introducing the mechanical motion into the confined etchant layer technique(CELT), we have developed a promising ultraprecision machining method, termed as electrochemical mechanical micromachining(ECMM), for producing both regular and irregular three dimensional(3 D) microstructures. It was found that there was a dramatic coupling effect between the confined etching process and the slow-rate mechanical motion because of the concentration distribution of electrogenerated etchant caused by the latter. In this article, the coupling effect was investigated systemically by comparing the etchant diffusion, etching depths and profiles in the non-confined and confined machining modes. A two-dimensional(2 D) numerical simulation model was proposed to analyze the diffusion variations during the ECMM process, which is well verified by the machining experiments. The results showed that, in the confined machining mode, both the machining resolution and the perpendicularity tolerance of side faces were improved effectively. Furthermore, the theoretical modeling and numerical simulations were proved valuable to optimize the technical parameters of the ECMM process.
Lianhuan HanYuchao JiaYongzhi CaoZhenjiang HuXuesen ZhaoShusen GuoYongda YanZhongqun TianDongping Zhan
关键词:机械运动
基于约束刻蚀原理的电化学微纳加工研究进展
2017年
与机械加工相比,电化学加工技术具有无刀具磨损、无热效应、无机械损伤、加工效率高等优点,而且适用于柔性、脆性及超硬材料,具备传统方法难以实现的复杂结构加工能力,因而在航空航天、汽车、微电子等领域有着重要应用,日益成为一种重要的工业制造技术.随着超大规模集成电路(ULSI)、微机电系统(MEMS)、微全分析系统(μ-TAS)、现代精密光学系统等高技术产业的迅速发展,功能性结构/器件的微型化和集成化的要求越来越高.由于传统电化学只适用于金属材料,为了应对微纳制造的时代要求,拓展电化学加工的材料普适性,1992年田昭武院士提出了具有我国自主知识产权的约束刻蚀剂层技术(CELT).一般的,约束刻蚀包括3个步骤:(1)通过电化学、光化学或光电化学的方法在模板电极表面生成刻蚀剂;(2)通过后续的均相化学反应或自由基衰变反应将刻蚀剂约束在微/纳米厚度的液层内;(3)将模板电极逼近加工基底,当约束刻蚀剂层接触被加工基底时,通过刻蚀反应实现微纳加工.最近,联合课题组通过仪器、原理和方法3个方面的努力,引入外部物理场调制技术,实现一维铣削、二维抛光、三维微/纳结构加工,大幅提升了CELT的技术水平.
韩联欢何权烽赵学森曹永智胡振江闫永达田昭武詹东平
关键词:电化学加工约束刻蚀剂层技术
Enhanced photoluminescence property of sulfate ions modified YAG:Ce^(3+) phosphor by co-precipitation method被引量:9
2017年
The sulfate ions modified YAG:Ce^(3+) phosphors were prepared by co-precipitation method and characterized by X-ray diffraction,transmission electron microscopy,and photoluminescence.Effects of sulfate ions on the photoluminescence(PL) property of the as-prepared YAG:Ce^(3+) phosphors were studied,with sodium dodecyl sulfate(SDS) being added to R^(3+)(Ce^(3+),Y^(3+),Al^(3+)) ions.Results indicated that pure YAG:Ce^(3+) phosphors with different ratios of sulfate ions could be easily obtained by calcining the as-synthesized precursor at 950 ℃ for 2 h,the YAG:Ce^(3+) phosphors with an optimal mass ratio of 3.5 wt.%SDS had the highest emission intensity and the best dispersion behavior,and the fluorescence decay of the as-obtained YAG:Ce^(3+) phosphors was related to the lattice defect,reabsorption and cross correlation.Furthermore,thermal quenching properties of the YAG:Ce^(3+) phosphors and the YAG:Ce^(3+) phosphors with 3.5 wt.%SDS were also discussed,indicating that the YAG:Ce^(3+) with SDS phosphors could have potential applications in the daylight LEDs or warm white LEDs.
阙美丹阙文修周婷邵金友孔令兵
关键词:光性质
Stretchable human-machine interface based on skin-conformal sEMG electrodes with self-similar geometry被引量:2
2018年
Current stretchable surface electrodes have attracted increasing attention owing to their potential applications in biological signal monitoring, wearable human-machine interfaces(HMIs) and the Internet of Things. The paper proposed a stretchable HMI based on a surface electromyography(sEMG) electrode with a self-similar serpentine configuration. The sEMG electrode was transfer-printed onto the skin surface conformally to monitor biological signals, followed by signal classification and controlling of a mobile robot. Such electrodes can bear rather large deformation(such as >30%) under an appropriate areal coverage. The sEMG electrodes have been used to record electrophysiological signals from different parts of the body with sharp curvature, such as the index finger,back of the neck and face, and they exhibit great potential for HMI in the fields of robotics and healthcare. The electrodes placed onto the two wrists would generate two different signals with the fist clenched and loosened. It is classified to four kinds of signals with a combination of the gestures from the two wrists, that is, four control modes. Experiments demonstrated that the electrodes were successfully used as an HMI to control the motion of a mobile robot remotely.
Wentao DongChen ZhuWei HuLin XiaoYong'an Huang
关键词:ELECTROMYOGRAPHY
钴氰化钠/氯化钠固体溶液微晶体的电化学制备及其特性
2014年
钴氰化钠与铁氰化钠结构类似,而其在固/液界面上的电子转移特性却并不显著.使用扫描电化学显微镜(SECM)构建了fL^pL体积的电化学微体系.在微体系中溶剂蒸发,电解质则会浓缩结晶.当电活性物质与支持电解质的晶格参数匹配时,二者可发生共结晶形成固体溶液.本文采用该方法制得钴氰化钠/氯化钠固体溶液微晶体,结合微加工技术构建了固体电极/固体溶液界面,该钴氰化钠在固体溶液中即有很好的电子转移特性.
朱益亮杨德志苏亚琼吴德印田中群詹东平
关键词:扫描电化学显微镜
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