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国家重点基础研究发展计划(2012CB619305)

作品数:9 被引量:6H指数:2
相关作者:阳明明王晓丹张纪才曾雄辉徐科更多>>
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AlN:Er薄膜在不同退火温度下应力诱导的微观结构演变被引量:3
2016年
以透射电镜中的弱束衍衬成像和高分辨相位衬度成像为主要表征手段,辅以X射线衍射、拉曼光谱等测试方法,对Al N:Er样品在退火过程中的微观结构演变过程进行了深入分析。在透射电镜观察下,Er离子注入的Al N样品在退火前存在三个区域:区域Ⅰ为自表面以下约30 nm深度;区域Ⅱ为区域I以下约50 nm深度;区域Ⅲ为区域Ⅱ以下的部分,其中区域Ⅱ为损伤最为严重的区域。在较低的温度(如1025℃时)退火后,区域Ⅰ消失;但1200℃退火后,又重新可以观察到区域Ⅰ。结合TEM、XRD和Raman测试结果,从损伤恢复和应力释放的角度对上述实验现象进行了理论解释:由于Er离子半径和基体原子半径的差异,在区域Ⅱ中引入较大的应力;在1025℃退火时,来自区域Ⅱ的应力作用于区域Ⅰ,导致区域I发生大的晶格扭曲,和区域II合并,用TEM观察不到;在1200℃退火时,应力在表面释放,区域I的晶格扭曲修复,从而用TEM可重新观察到。
阳明明莫亚娟王晓丹曾雄辉刘雪华黄俊张纪才王建峰徐科
关键词:离子注入
Pr^(3+),Tm^(3+)共注入氮化铝薄膜的光谱特性
2016年
采用离子注入的方法在氮化铝薄膜中实现Pr3+和Tm3+元素的单掺杂和共掺杂。以Raman光谱为主要表征手段,对离子注入过程中薄膜内部的应力变化进行研究;以阴极荧光为主要表征手段,对其低温和室温下的发光特性进行研究。Raman光谱的结果显示,离子注入过程使得薄膜内部应力下降,而退火过程使得薄膜内部应力升高。阴极荧光光谱结果显示,Al N∶Pr3+主要跃迁峰位于528 nm;Al N∶Tm3+主要跃迁峰位位于467 nm;Al N∶Pr3+,Tm3+主要跃迁峰位位于528 nm和467 nm。Al N∶Tm3+的低温光谱显示,与1I6和1D2两个能态相关的跃迁峰相对强度会随着温度出现急剧变化,由此表明在Tm3+之间存在与温度相关的相互作用。
阳明明王晓丹曾雄辉郭昀张纪才徐科
关键词:氮化铝薄膜光谱特性
Mobility limited by cluster scattering in ternary alloy quantum wires
2014年
The mobility limited by cluster scattering in ternary alloy semiconductor quantum wire(QWR) is theoretically investigated under Born approximation. We calculate the screened mobility due to clusters(high indium composition InGaN) scattering in the InxGa1 xN QWR structure. The characteristics of the cluster scattering mechanism are discussed in terms of the indium composition of clusters, the one-dimensional electron gas(1DEG) concentration, and the radius of QWR. We find that the density, breadth of cluster, and the correlation length have a strong effect on the electron mobility due to cluster scattering. Finally, a comparison of the cluster scattering is made with the alloy-disorder scattering. It is found that the cluster scattering acts as a significant scattering event to impact the resultant electron mobility in ternary alloy QWR.
张恒杨少延刘贵鹏王建霞金东东李辉杰刘祥林朱勤生王占国
关键词:MOBILITYCLUSTERSCATTERINGONE-DIMENSIONALELECTRON
Electron mobility limited by surface and interface roughness scattering in Al_xGa_(1-x)N/GaN quantum wells
2013年
The electron mobility limited by the interface and surface roughness scatterings of the two-dimensional electron gas in AlxGa1-xN/GaN quantum wells is studied. The newly proposed surface roughness scattering in the AlGaN/GaN quantum wells becomes effective when an electric field exists in the AlxGa1-xN barrier. For the AlGaN/GaN potential well, the ground subband energy is governed by the spontaneous and the piezoelectric polarization fields which are determined by the barrier and the well thicknesses. The thickness fluctuation of the AlGaN barrier and the GaN well due to the roughnesses cause the local fluctuation of the ground subband energy, which will reduce the 2DEG mobility.
王建霞杨少延王俊刘贵鹏李志伟李辉杰金东东刘祥林朱勤生王占国
关键词:ALGAN二维电子气子带能量
Strain Distributions in Non-Polar a-Plane In_(x)Ga_(1−x)N Epitaxial Layers on r-Plane Sapphire Extracted from X-Ray Diffraction
2013年
By using x-ray diffraction analysis,we investigate the major structural parameters such as strain state and crystal quality of non-polar a-plane In_(x)𝑦Ga_(1−x)𝑦N thin films grown on r-sapphire substrates by metalorganic chemical vapour deposition.The results of the inplane grazing incidence diffraction technique are analyzed and compared with a complementary out-of-plane high resolution x-ray diffraction technique.When the indium composition is low,the a-plane In_(x)𝑦Ga_(1−x)𝑦N layer is tensile strain in the growth direction(𝑏a-axis)and compressive strain in the two in-plane directions(𝑛a-axis and𝑑a-axis).The strain status becomes contrary when the indium composition is high.The stress in the𝑛a-axis direction𝜏σyy is larger than that in the a-axis directionσzz.Furthermore,strain in the two in-plane directions decrease and the crystal quality becomes better with the growing of the In_(x)Ga_(1−z)N film.
赵桂娟杨少延刘贵鹏刘长波桑玲谷承艳刘祥林魏鸿源朱勤生王占国
关键词:PLANE
Progress in bulk GaN growth被引量:2
2015年
Three main technologies for bulk GaN growth,i.e.,hydride vapor phase epitaxy(HVPE),Na-flux method,and ammonothermal method,are discussed.We report our recent work in HVPE growth of GaN substrate,including dislocation reduction,strain control,separation,and doping of GaN film.The growth mechanisms of GaN by Na-flux and ammonothermal methods are compared with those of HVPE.The mechanical behaviors of dislocation in bulk GaN are investigated through nano-indentation and high-space resolution surface photo-voltage spectroscopy.In the last part,the progress in growing some devices on GaN substrate by homo-epitaxy is introduced.
徐科王建峰任国强
关键词:GAN氢化物气相外延HVPE高空间分辨率表面光电压
Influence of thickness on strain state and surface morphology of AlN grown by HVPE被引量:1
2016年
A1N thick films were grown on c-plane sapphire substrates by hydride vapor phase epitaxy at high temperature.The evolution of the strain state and crystal quality of A1 N with increase of thickness were investigated by transmission electron microscopy,field-emission scanning electron microscopy,Raman spectra and atomic force microscopy(AFM).As the thickness increased,the stress in the epilayers decreased gradually,which was attributed to the reaction of dislocations at the first several microns in thickness.When the thickness was more than 20 μm,the stress was almost fully relaxed due to the formation of cracks.Wet etching experiments indicated that the dislocation density decreased with the increase of thickness.The AFM images showed that the density of dark spots on the surface obviously decreased and the atomic steps became straight as the thickness increased.
孙茂松张纪才黄俊李雪威王林军刘雪华王建峰徐科
关键词:AINHVPE
Leakage of photocurrent: an alternative view on I–V curves of solar cells
2015年
An alternative way is proposed to interpret I–V characteristics of Ga In P single-junction solar cells by position-dependent leakage of photocurrent. With this approach, the I–V curves of solar cells under non-uniform illumination are well analyzed. The effective spreading resistance is also extracted to understand the dynamic behavior of between the open-circuit voltage and short-circuit current points. The conditions under which the onediode model will fail are addressed in detail. These analyses are also applicable for a characterization of the I–V curves with lateral voltage distribution under uniform illumination.
周桃飞熊康林张敏刘磊田飞飞张志强顾泓黄俊王建峰董建荣徐科
关键词:光电流
Aluminum incorporation efficiencies in A- and C-plane AlGaN grown by MOVPE
2016年
The aluminum incorporation efficiencies in nonpolar A-plane and polar C-plane AlGaN films grown by metalorganic vapour phase epitaxy(MOVPE) are investigated. It is found that the aluminum content in A-plane AlGaN film is obviously higher than that in the C-plane sample when the growth temperature is above 1070?C. The high aluminum incorporation efficiency is beneficial to fabricating deep ultraviolet optoelectronic devices. Moreover, the influences of the gas inlet ratio,the Ⅴ/Ⅲ ratio, and the chamber pressure on the aluminum content are studied. The results are important for growing the AlGaN films, especially nonpolar AlGaN epilayers.
韩东岳李辉杰赵桂娟魏鸿源杨少延汪连山
关键词:MOVPE生长ALGANGAN薄膜气相外延生长
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