A novel process to gain clear and high edge acuity micropatterns of TiO2 thin films by direct microcontact printing was presented in this paper. Using TiO2 sol as the “ink”, poly（dimethylsiloxane） elastomeric stamp was taken to transfer the TiO2 colloids to the substrate. The process is different from the traditional process using the SAMS to induce the deposition of TiO2. The new way increases the transferred efficiency of the micropatterned TiO2 thin films. The optical micrographs and SEM show that the micropatterned structures of TiO2 were microscale and uniform over a large area as well.
